The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Mar. 14, 2003
Applicants:
Qiwen Zhan, Centerville, OH (US);
James R. Leger, Plymouth, MN (US);
Inventors:
Qiwen Zhan, Centerville, OH (US);
James R. Leger, Plymouth, MN (US);
Assignee:
Regents of the University of Minnesota, Minneapolis, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J004/00 ;
U.S. Cl.
CPC ...
Abstract
A solid immersion tunneling ellipsometer and methods relating thereto may include a solid immersion apparatus (e.g., a prism or an objective lens in combination with a solid immersion lens) that facilitates optical tunneling and provide information that can be used in the determination of one or more characteristics (e.g., thickness, index of refraction, etc.) of samples (e.g., thin films, ultrathin films, etc.).