logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6933511 B1

PDFFull Text
Expired
Date of Patent:
Aug. 23, 2005

Filed:

Nov. 18, 2003

Ion implanting apparatus

Applicants:

Tsun-neng Yang, Taoyuan, TW;

Tai-cheng Gunng, Taoyuan, TW;

Wei-yang MA, Taoyuan, TW;

Yu-tang Yang, Taoyuan, TW;

Ming-ruesy Tsai, Taoyuan, TW;

Kao-chi Lan, Taoyuan, TW;

Inventors:

Tsun-Neng Yang, Taoyuan, TW;

Tai-Cheng Gunng, Taoyuan, TW;

Wei-Yang Ma, Taoyuan, TW;

Yu-Tang Yang, Taoyuan, TW;

Ming-Ruesy Tsai, Taoyuan, TW;

Kao-Chi Lan, Taoyuan, TW;

Assignee:

Atomic Energy Council Institute of Nuclear Energy Research, Lungtan Taoyuan, TW;

Attorney:

Harrison & Egbert

Primary Examiner:

Nikita Wells

Assistant Examiner:

Anthony Quash

Int. Cl.
CPC ...
G21K005/10 ;
U.S. Cl.
CPC ...
Abstract

An ion implanting apparatus of has a wafer cassette capable of loading a plurality of wafers, an implanting chamber including an implanting base, a cassette-transferring module for moving the wafer cassette, and a wafer-transferring module for moving the wafer from the wafer cassette to the implanting base. The wafer cassette has a plurality of irradiation trays for loading the wafer, while the implanting base has a guiding slot for guiding the irradiation tray. The cassette-transferring module includes a rack positioned on the wafer cassette, a gear for moving the wafer cassette by driving the rack through rotating, and a first stepping motor for driving the gear. The wafer-transferring module has a push plate for moving the irradiation tray from the wafer cassette to the implanting base, and a second stepping motor for driving the push plate.

Find Patent Forward Citations

Yang, Tsun-Neng. (2005). Ion implanting apparatus (U.S. Patent No. 6933511). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6933511

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…