The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Nov. 10, 2003
Applicants:
David Yogev, Nesher, IL;
Boris Livshitz (Buyaner), Yokneam, IL;
Inventors:
David Yogev, Nesher, IL;
Boris Livshitz (Buyaner), Yokneam, IL;
Assignee:
Oramir Semiconductor Equipment Ltd., Yokneam, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K026/00 ;
U.S. Cl.
CPC ...
Abstract
A method and apparatus for removing contaminants from the surface of a substrate. An explosive medium is introduced into a vicinity of the substrate, and a beam of electromagnetic energy is directed toward the substrate. Absorption of the electromagnetic energy causes the explosive medium both to generate a blast wave and to form reactive species, the blast wave and the reactive species cooperating to remove the contaminants from the surface substantially without damage to the surface itself.