The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 23, 2005
Filed:
Jun. 13, 2003
Applicants:
Keith Edward Buchanan, Monmouthshire, GB;
Joon-chai Yeoh, South Wales, GB;
Inventors:
Keith Edward Buchanan, Monmouthshire, GB;
Joon-Chai Yeoh, South Wales, GB;
Assignee:
Trikon Technologies Limited, Newport, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L021/31 ; H01L021/469 ;
U.S. Cl.
CPC ...
Abstract
A low k porous dielectric film is described wherein the exposed surface or surfaces of the film are substantially non-porous. A densification method is described for treating such exposed surfaces to render porous surfaces non-porous.