The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Jul. 31, 2003
Peter G. Hartwell, Sunnyvale, CA (US);
Storrs T. Hoen, Brisbane, CA (US);
David Horsley, Berkeley, CA (US);
Chung Ching Yang, Saratoga, CA (US);
Paul P. Merchant, Belmont, CA (US);
Carl P. Taussig, Redwood City, CA (US);
Peter G. Hartwell, Sunnyvale, CA (US);
Storrs T. Hoen, Brisbane, CA (US);
David Horsley, Berkeley, CA (US);
Chung Ching Yang, Saratoga, CA (US);
Paul P. Merchant, Belmont, CA (US);
Carl P. Taussig, Redwood City, CA (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
A microelectromechanical system includes a first wafer, a second wafer including a moveable portion, and a third wafer. The movable portion is movable between the first wafer and the third wafer. The first wafer, the second wafer, and the third wafer are bonded together.