The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Apr. 25, 2002
Christian Bergaud, Toulouse, FR;
Benoît Belier, Orsay, FR;
Augustin Martinez, Orens, FR;
Nicu Livus, Aragon, FR;
Emeline Cocheteau, Toulouse, FR;
Christian Bergaud, Toulouse, FR;
Benoît Belier, Orsay, FR;
Augustin Martinez, Orens, FR;
Nicu Livus, Aragon, FR;
Emeline Cocheteau, Toulouse, FR;
Centre National de la Recherche, Paris, FR;
Abstract
The invention relates to a biosensor matrix comprising a substrate made of semiconductor material. It has a main plane surface and cavities formed in a surface opposite from said plane surface to define between the bottoms of said cavities and the main plane surface deformable structure each including at least one piezoresistive or piezoelectric sensing element. The method of manufacture implements fabrication techniques specific to micro- and nanotechnologies, preferably with localized pre-amorphization of the surface of the substrate prior to implantation of piezoelectric elements, which implantation is followed by annealing.