The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Oct. 21, 2003
Kyle M. Hanson, Kalispell, MT (US);
Eric Lund, Kent, WA (US);
Coby Grove, Whitefish, MT (US);
Steven L. Peace, Whitefish, MT (US);
Paul Z. Wirth, Columbia Falls, MT (US);
Scott A. Bruner, Kalispell, MT (US);
Jonathan Kuntz, Kalispell, MT (US);
Kyle M. Hanson, Kalispell, MT (US);
Eric Lund, Kent, WA (US);
Coby Grove, Whitefish, MT (US);
Steven L. Peace, Whitefish, MT (US);
Paul Z. Wirth, Columbia Falls, MT (US);
Scott A. Bruner, Kalispell, MT (US);
Jonathan Kuntz, Kalispell, MT (US);
Semitool, Inc., Kalispell, MT (US);
Abstract
A system and method for processing a workpiece, includes workpiece processors. A robot is moveable within an enclosure to load and unload workpieces into and out of the processors. A processor includes an upper rotor having a central air flow opening. The upper rotor is magnetically driven into engagement with a lower rotor to form a workpiece processing chamber. A moveable drain mechanism aligns different drain paths with the processing chamber so that different processing fluids may be removed from the processing chamber via different drain paths. A moveable nozzle positioned in the air flow opening distributes processing fluid to the workpiece. The processing fluid is distributed across the workpiece surface, via centrifugal force generated by spinning the processing chamber, and removed from the processing chamber via the moveable drain mechanism.