The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Sep. 13, 2002
Applicants:
Jashu Patel, Yaton, GB;
Knut Beekman, Weston-in-Gordano, GB;
Inventors:
Jashu Patel, Yaton, GB;
Knut Beekman, Weston-in-Gordano, GB;
Assignee:
Trikon Holdings Limited, Newport, GB;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C016/02 ; C23C016/34 ; C23C016/50 ;
U.S. Cl.
CPC ...
Abstract
A silicon nitride film, for example, is deposited by introducing into a plasma region of a chamber a silicon containing gas, molecular nitrogen and sufficient hydrogen to dissociate the nitrogen to allow the silicon and nitrogen to react to form a silicon nitride film on a surface adjacent the plasma region. The thus deposited film may then be subjected to an activation anneal.