The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Sep. 09, 2002
Applicants:
Hisashi Shimakage, Tokyo, JP;
Atsushi Saito, Tokyo, JP;
Akira Kawakami, Tokyo, JP;
Zhen Wang, Tokyo, JP;
Inventors:
Hisashi Shimakage, Tokyo, JP;
Atsushi Saito, Tokyo, JP;
Akira Kawakami, Tokyo, JP;
Zhen Wang, Tokyo, JP;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D005/12 ; H01L039/24 ; C23C014/32 ;
U.S. Cl.
CPC ...
Abstract
A method includes forming an as-grown film of a superconductor composed of a MgBcompound which is made by simultaneous evaporation of magnesium and boron. The as-grown film is superconductive without an annealing process to make the film superconductive. The method can be applied to fabricate an integrated circuit of the superconductor film, because a high temperature annealing process to make the as-grown film superconductive is not needed.