The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Apr. 12, 2002
Heinz-peter Frerichs, St. Peter, DE;
Heinz-Peter Frerichs, St. Peter, DE;
Micronas GmbH, Freiburg, DE;
Abstract
The invention relates to a sensor for measuring a gas concentration or ion concentration which has a substrate (), a drain () formed on the substrate, a source () formed on the substrate, a channel area () of the substrate located between drain () and source (), a conductive guard ring () located outside the channel area, and a sensitive gate layer () whose potential depends on the surrounding gas or ion concentration, with an air gap () provided between the gate layer and channel area (). In order to create a sensor that can be made economically and compactly which nevertheless ensures exact measurement of a change in concentration with time, it is provided that surface profiling (and) be formed between guard ring () and channel area ().