The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
May. 09, 2003
Gordon Robert Green, Bristol, GB;
Robert Kenneth Trowell, Bristol, GB;
Gordon Robert Green, Bristol, GB;
Robert Kenneth Trowell, Bristol, GB;
Trikon Technologies Limited, Newport, GB;
Abstract
This invention relates to a shutter for use in physical vapour deposition apparatus having a chamber. The shutter, generally indicated at, is located in a side housingof the vacuum chamber, whilst sputtering is taking place. Once the substrateis treated, the substrate is removed from the chamber and the shutter is brought in to an operative position above a wafer pedestal or supportThe shutter is mounted on an armusing a fixing boss, the arm and the boss being magnetically coupled.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile