The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Dec. 22, 1998
Yoshihide Wakayama, Chigasaki, JP;
Sadao Kobayashi, Yokohama, JP;
Satoki Sugiyama, Sendai, JP;
Seiichi Takizawa, Sagamihara, JP;
Takeshi Yamada, Machida, JP;
Keiji Matsuno, Fuchu, JP;
Yoshihide Wakayama, Chigasaki, JP;
Sadao Kobayashi, Yokohama, JP;
Satoki Sugiyama, Sendai, JP;
Seiichi Takizawa, Sagamihara, JP;
Takeshi Yamada, Machida, JP;
Keiji Matsuno, Fuchu, JP;
Abstract
The present invention has as its object to provide an air filter not only for trapping suspended particulate substances but also for not generating hazardous contaminates in the air, which cause trouble in the manufacture of semiconductor devices. As a binder to bind fibers of the air filter together, a polymer dispersion is used in which a copolymer of a hydrophilic monomer and a hydrophobic monomer is dispersed in water. As an initiator for polymerization of the copolymer, an organic peroxide is used. When an air filter () is installed downstream of a chemical filter (), the space () placed downstream of the air filter () is made substantially free of organic substances and/or inorganic substances that cause trouble in the manufacture of semiconductor devices.