The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 16, 2005
Filed:
Sep. 19, 2002
Yehiel Gotkis, Fremont, CA (US);
Aleksander Owczarz, San Jose, CA (US);
David Hemker, San Jose, CA (US);
Nicolas Bright, San Jose, CA (US);
Rodney Kistler, Los Gatos, CA (US);
Yehiel Gotkis, Fremont, CA (US);
Aleksander Owczarz, San Jose, CA (US);
David Hemker, San Jose, CA (US);
Nicolas Bright, San Jose, CA (US);
Rodney Kistler, Los Gatos, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A system and method of measuring a metallic layer on a substrate within a multi-step substrate process includes modifying a metallic layer on the substrate such as forming a metallic layer or removing at least a portion of the metallic layer. At least one sensor is positioned a predetermined distance from the surface of the substrate. The surface of the substrate is mapped to determine a uniformity of the metallic layer on the surface of the substrate.