The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Sep. 28, 2000
Applicant:
Thomas Vogl, Geretsried, DE;
Inventor:
Thomas Vogl, Geretsried, DE;
Assignee:
Siemens Aktiengesellschaft, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F017/50 ;
U.S. Cl.
CPC ...
Abstract
In a method for recognizing etch-critical regions, the critical regions are already determined in the layout under the processor control dependent on the fabrication-oriented rules and are automatically rectified in the existing layout, so that under-etchings are avoided in the following etching procedures.