The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Jul. 02, 2001
Applicant:
Eiji Yonezawa, Aichi, JP;
Inventor:
Eiji Yonezawa, Aichi, JP;
Assignee:
Nidek Co., Ltd., Aichi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K009/00 ;
U.S. Cl.
CPC ...
Abstract
A defect inspection method of inspecting a defect of an inspection object having a chip pattern, the defect inspection method comprising the steps of: inputting a captured first image of the inspection object; obtaining a second image having a predetermined size based on one of a chip size and a size of exposure shot from the inputted first image; determining an averaged luminance of the obtained second image; and detecting the defect based on the determined averaged luminance and a predetermined inspection condition.