Method for imaging measurement, imaging measurement device and use of measured information in process control

Abstract

The invention relates to method for imaging measurement of a moving or flowing target and to an imaging measuring device for implementing the aforementioned method. Moreover, the invention relates to the use of information measured by means of imaging measurement in the control and/or adjustment of a process. According to the invention, electromagnetic radiation obtained from the moving or flowing target (T) is focused by means of imaging optics to produce an image to the screen of a two-dimensional matrix detector at least via a first and a second filter (F, F) which transmit electromagnetic radiation in manners differing from each other. Said at least first and second filter form on the screen of the detector at least a first and a second filter area (FR, R) that partly cover the light-sensitive area (DA) of the detector. The properties of the target (T) are determined spectroscopically by comparing and/or combining spectrally resolved information, which is recorded when a pixel which corresponds to a determined part of the target kto be measured and is focused on the screen (DA) of the matrix detector without beamsplitting travels under the effect of the movement of the target (T) via said at least first and second filter area (FR, FR). The area of the screen (DA) of the detector remaining outside siad filter areas (FR, FR) is used for other kind of imaging non-spectroscopic measurement and/or visualization of the target.