The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Feb. 27, 2001
Kazuya Ono, San Carlos, CA (US);
Douglas C. Watson, Campbell, CA (US);
Andrew Hazelton, San Carlos, CA (US);
Kazuya Ono, San Carlos, CA (US);
Douglas C. Watson, Campbell, CA (US);
Andrew Hazelton, San Carlos, CA (US);
Nikon Corporation, , JP;
Abstract
A stage assembly () for independently moving and positioning a first device (A) and a second device (A) in an operation area () is provided herein. The stage assembly () includes a stage base (), a first stage (), a first mover assembly (), a second stage (), and a second mover assembly (). The first mover assembly () moves the first stage () and the first device (A) into the operational area () and the second mover assembly () moves the second stage () and the second device (B) into the operational area (). The present stage assembly () reduces and minimizes the amount of reaction forces and disturbances that are transferred between the stages (), (). This improves the positioning performance of the stage assembly (). Further, for an exposure apparatus (), this allows for more accurate positioning of two semiconductor wafers () relative to a reticle () or some other reference.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile