The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Sep. 01, 2004
Hitoshi Wakizako, Fukuoka, JP;
Kazunari Shiraishi, Fukuoka, JP;
Yukito Sagasaki, Fukuoka, JP;
Ken-ichi Motonaga, Fukuoka, JP;
Kazunori Hino, Fukuoka, JP;
Hiroki Sanemasa, Fukuoka, JP;
Hitoshi Wakizako, Fukuoka, JP;
Kazunari Shiraishi, Fukuoka, JP;
Yukito Sagasaki, Fukuoka, JP;
Ken-ichi Motonaga, Fukuoka, JP;
Kazunori Hino, Fukuoka, JP;
Hiroki Sanemasa, Fukuoka, JP;
Kabushiki Kaisha Yaskawa Denki, Fukuoka, JP;
Abstract
A transfer robot () for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (), comprising an inspection camera () for detecting the stored state of the thin substrates () in a storage cassette (), wherein the plurality of thin substrates () stored in the storage cassette () are carried out from the storage cassette () by the robot.