The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Jul. 01, 2002
Applicant:
Jean-sébastien Danel, Echirolles, FR;
Inventor:
Jean-Sébastien Danel, Echirolles, FR;
Assignee:
Commissariat a l'Energie Atomique, Paris, FR;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L021/302 ; H01L021/3065 ;
U.S. Cl.
CPC ...
Abstract
This device, which is used to measure pressures or accelerations for example, comprises an isolation layer () that holds at least one piezoresistive gauge (). The side tangents (T) of this gauge essentially make up over 90° angles with the surface () of the isolation layer. The device may be created using processes of wet isotropic etching, chemical anisotropic etching or isolation material growth processes.