The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Jan. 17, 2003
Paul V. Kelsey, Wilmington, DE (US);
Paul V. Kelsey, Wilmington, DE (US);
Other;
Abstract
The invention is directed to a method of producing polycrystaline silicon metal from a silicon halide plasma source. The silicon halide is split into silicon and halide ions in an inductively coupled plasma and silicon ions are then condensed to form molten silicon metal that can be vacuum cast into polysilicon ingots. The halide ions are separated and recycled into silicon halide gas over a silicon dioxide bed. In this way, high grade polysilicon is produced without a metallurgical grade silicon precursor and the process these processes consumes the byproducts in a continuous manner madding it less expensive than traditional methods of producing polysilicon and more environmentally friendly.