The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Mar. 22, 2002
Applicant:
Jun-taek Lee, Kimjae, KR;
Inventor:
Jun-Taek Lee, Kimjae, KR;
Assignee:
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F001/00 ; H01L021/306 ; C23C016/00 ;
U.S. Cl.
CPC ...
Abstract
An exhaust ring made of a material other than quartz, thereby reducing the creation of polymer particles on the exhaust ring is provided in the present invention. The exhaust ring of the present invention is formed of two parts wherein only one part is exposed to and etched by plasma. Accordingly, only the etched and damaged part will require replacement due to plasma damage, thus reducing production costs. More particularly, the exhaust ring comprises an upper ring that is exposed to plasma and a lower ring that is not exposed to plasma.