The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 09, 2005
Filed:
Dec. 30, 2002
Sang Hee Park, Daejon-Shi, KR;
Sun Jin Yun, Daejon-Shi, KR;
Young Shin Kim, Daejon-Shi, KR;
Yong Eui Lee, Seoul-Shi, KR;
Sang Hee Park, Daejon-Shi, KR;
Sun Jin Yun, Daejon-Shi, KR;
Young Shin Kim, Daejon-Shi, KR;
Yong Eui Lee, Seoul-Shi, KR;
Abstract
A method of forming a passivation film in a flat panel display device includes forming the flat panel display device on a substrate, bringing the flat panel display device into a chamber in order to form the passivation film, injecting precursors containing constituent elements of the passivation film into the chamber where the precursors include at least oxygen plasma, ammonia plasma, or nitrogen plasma, and forming the passivation film of an inorganic insulating material at a temperature of 20-220° C. through a surface chemical reaction between the precursors by a plasma enhanced atomic layer deposition method.