The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 02, 2005

Filed:

Oct. 25, 2002
Applicants:

Satoshi Shimizu, Tochigi, JP;

Masaru Matsuyama, Tochigi, JP;

Inventors:

Satoshi Shimizu, Tochigi, JP;

Masaru Matsuyama, Tochigi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L041/08 ;
U.S. Cl.
CPC ...
Abstract

A piezoelectric vibrator has a container having a hermetically sealed cavity and a transparent portion for transmitting therethough a laser beam into the hermetically sealed cavity. A piezoelectric vibrator piece is disposed in the hermetically sealed cavity. A gettering substance is disposed directly on a surface of the piezoelectric vibrator piece so that when a laser beam is irradiated on the metal film through the transparent portion of the container the metal film is vaporized to absorb any gases contained in the hermetically sealed cavity of the container to thereby increase a degree of vacuum within the hermetically sealed cavity.


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