The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Nov. 12, 2002
Simone Sassolini, Sansepolcro, IT;
Marco Del Sarto, Massa, IT;
Giovanni Frezza, San Donato Milanese, IT;
Lorenzo Baldo, Bareggio, IT;
Simone Sassolini, Sansepolcro, IT;
Marco Del Sarto, Massa, IT;
Giovanni Frezza, San Donato Milanese, IT;
Lorenzo Baldo, Bareggio, IT;
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A process for the fabrication of devices that integrate protected microstructures, comprising the following steps: forming, in a body of semiconductor material, at least one microstructure having at least one first portion and one second portion which are relatively mobile with respect to one another and are separated from one another by at least one gap region, which is accessible through a face of the body; and sealing the gap. The sealing step includes depositing on the face of the body a layer of protective material, in such a way as to close the gap region, the protective layer being such as to enable relative motion between the first portion and the second portion of the microstructure.