The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
May. 01, 2003
James C. Nohava, Inver Grove Heights, MN (US);
Robert A. Morgan, Plymouth, MN (US);
Eva M. B. Strzelecka, Plymouth, MN (US);
Yue Liu, Plymouth, MN (US);
James C. Nohava, Inver Grove Heights, MN (US);
Robert A. Morgan, Plymouth, MN (US);
Eva M. B. Strzelecka, Plymouth, MN (US);
Yue Liu, Plymouth, MN (US);
Finisar Corporation, Sunnyvale, CA (US);
Abstract
Methods for sealing or passivating the edges of chips such as vertical cavity surface emitting lasers (VCSEL) is disclosed. One method includes oxidizing the edges of die at the wafer level prior to cutting the wafer into a plurality of die. This may be accomplished by etching a channel along the streets between die, followed by oxidizing the channel walls. The oxidation preferably oxidizes the aluminum bearing layers that are exposed by the channel walls inward for distance. Aluminum bearing layers, including AlAs and AlGaAs, may be oxidized to a stable native oxide that is resistant to further oxidation by the environment. After oxidation, the wafer can be cut along the channels into a number of die, each having a protective oxide layer on the side surfaces.