The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Jul. 19, 2001
Nagaraja P. Rao, San Leandro, CA (US);
Joachim Heberlein, North Oaks, MN (US);
William Gerberich, Shorewood, MN (US);
Steven L. Girshick, Minneapolis, MN (US);
Peter H. Mcmurry, Minneapolis, MN (US);
Nagaraja P. Rao, San Leandro, CA (US);
Joachim Heberlein, North Oaks, MN (US);
William Gerberich, Shorewood, MN (US);
Steven L. Girshick, Minneapolis, MN (US);
Peter H. McMurry, Minneapolis, MN (US);
Regents of the University of Minnesota, Minneapolis, MN (US);
Abstract
A particle beam deposition apparatus includes a particle source for generating a plurality of particles in suspended form, an expansion chamber, and a deposition chamber connected to the expansion chamber by an aerodynamic focusing stage, and containing a substrate. The aerodynamic focusing stage may be comprised of a plurality of aerodynamic focusing elements, or lenses. Particles, including nanoparticles, may be deposited on the substrate by generating an aerosol cloud of particles, accelerating the particles into the expansion chamber, creating a collimated beam out of the particles by passing them through the aerodynamic focusing lenses and into a deposition chamber, and impacting the particles into the substrate.