The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Jul. 31, 2001
Jeffrey Alexander Wilmer, Mesa, AZ (US);
Daniel Kase Mackenzie, Scottsdale, AZ (US);
John Michael Lull, Claremont, CA (US);
Eric A. Zadai, Gilbert, AZ (US);
Michael Loren Walker, Phoenix, AZ (US);
Jeffrey Alexander Wilmer, Mesa, AZ (US);
Daniel Kase Mackenzie, Scottsdale, AZ (US);
John Michael Lull, Claremont, CA (US);
Eric A. Zadai, Gilbert, AZ (US);
Michael Loren Walker, Phoenix, AZ (US);
Celerity, Inc., Austin, TX (US);
Abstract
A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals. The apparatus may include a dispensing subsystem that supplies process materials to a mixing subsystem where they are blended with a static mixer. The method may include supplying process materials with a dispensing subsystem and blending the process materials in a static mixer.