The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Aug. 09, 2002
Stephen John Carlson, Shorewood, MN (US);
Stephen John Carlson, Shorewood, MN (US);
The BOC Group, Inc., Murray Hill, NJ (US);
Abstract
A method for flushing gas pockets from a manifold that forms a part of a liquid sampling system that is compatible with a chemical-mechanical polishing system is described. A flushing liquid, e.g., ultra pure water, is introduced into, and expelled from, the manifold to expel gas pockets from the manifold. The method comprises the steps of opening a manifold vent, filling the manifold with the flushing liquid, and closing the vent to increase the velocity of the flushing liquid flowing through the manifold. The introduction of the flushing liquid is discontinued, and thereafter, resumed. The discontinuation and resumption steps are preferably repeated The manifold is thus flushed of gas pockets.