The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 02, 2005
Filed:
Feb. 20, 2002
Jochen Franz, Reutlingen, DE;
Oliver Kohn, Reutlingen, DE;
Frank Henning, Reutlingen, DE;
Matthias Maute, Tuebingen, DE;
Jochen Franz, Reutlingen, DE;
Oliver Kohn, Reutlingen, DE;
Frank Henning, Reutlingen, DE;
Matthias Maute, Tuebingen, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
For a sensor whose sensor structure is implemented in a micromechanical structural component and which has parts which are movable in relation to the stationary substrate of the structural component, and which also includes an unsupported a seismic mass, a spring system having at least one spring, the seismic mass being connected to the substrate through the spring system, and an overload protection to limit the deflection of the spring system and the seismic mass in at least one direction, and an arrangement for detecting the deflections of the spring system and the seismic mass, whereby the impact forces may be reduced to prevent conchoidal breaks and resulting incipient damage to the sensor structure, as well as formation of particles. To that end, at least one two-dimensional stop for at least one moving part of the sensor structure is provided as overload protection. Alternatively or in addition thereto, at least one spring or resilient stop for at least one moving part of the sensor structure is provided as overload protection.