The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
Dec. 16, 2002
Guoqiao Tao, Nijmegen, NL;
Roy Arthur Colclaser, Albuquerqu, NM (US);
Guoqiao Tao, Nijmegen, NL;
Roy Arthur Colclaser, Albuquerqu, NM (US);
Koninklijke Philips Electronics N.V., Eindhoven, NL;
Abstract
There is a test structure on a semiconductor substrate for testing misalignment between adjacent implanted regions of opposite conductivity in a semiconductor device. In an example embodiment, the test structure includes a first and a second triple well structure; the second triple well structure is adjacent to the first triple well-structure in a first direction. Each structure includes a lower buried n-well region, a p-well region, a p-region, an n-well region and a base n-region, wherein a central base portion and a central n-well region portion are common to the first and the second structure, with the central base portion as a symmetry line with a width. Between the central base portion and the p-well region in the first triple well-structure a first overlay, and between the central base portion and the p-well region in the second triple well-structure a second overlay is provided.