The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
Oct. 24, 2002
George Nicholas Bullen, Oxnard, CA (US);
George Nicholas Bullen, Oxnard, CA (US);
Northrop Grumman Corporation, Los Angeles, CA (US);
Abstract
In an embodiment of the present invention, the same provides an edge sensor capable of locating an edge under a substrate. The edge sensor comprises a radiation source, a scanner, a microprocessor, and an indicator. The radiation source emits photons that are scattered back to the direction of the radiation source. The scanner measures the count rate or the amount of radiation back scattered by the substrate along a line on the substrate. After a series of count rates have been measured at various points along a line on the substrate that data is received and the microprocessor calculates a response function centroid which is the position of the edge. The indicator indicates the edge position.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile