The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
Aug. 12, 2003
Applicants:
Victor Krasnov, Tarzana, CA (US);
Kai-wei Nieh, Monrovia, CA (US);
Su-jen Ting, Encino, CA (US);
Inventors:
Assignee:
Front Edge Technology, Baldwin Park, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C014/35 ;
U.S. Cl.
CPC ...
Abstract
In a method of manufacturing a thin film battery in a chamber, a target comprising LiCoOis provided on a magnetron cathode in the chamber, and a substrate is placed facing the target. A process gas is introduced into the chamber and the process gas is energized to form a plasma to sputter the target to deposit LiCoOon the substrate. An ion flux of from about 0.1 to about 5 mA/cmis delivered from the plasma to the substrate to enhance the crystallinity of the deposited LiCoOmaterial on the substrate. The process gas is exhausted from the chamber. The target can also be made of other materials.