The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
Jul. 23, 2002
John Gregg, San Jose, CA (US);
Scott Battle, Cedar Park, TX (US);
Jeffrey I. Banton, Burnet, TX (US);
Donn Naito, Marble Falls, TX (US);
Marianne Fuierer, Durham, NC (US);
John Gregg, San Jose, CA (US);
Scott Battle, Cedar Park, TX (US);
Jeffrey I. Banton, Burnet, TX (US);
Donn Naito, Marble Falls, TX (US);
Marianne Fuierer, Durham, NC (US);
Advanced Technology Materials, Inc., Danbury, CT (US);
Abstract
A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.