The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 26, 2005
Filed:
May. 26, 2004
Kiyoshi Sawada, Shizuoka, JP;
Kenzo Ebihara, Yamanashi, JP;
Yasuhiro Sakaida, Yamanashi, JP;
Fanuc LTD, Yamanashi, JP;
Abstract
A microscopic positioning device having machine rigidity and being capable of achieving nano-order positioning accuracy and a method of compensating tool position and orientation. A driving unit comprises two piezoelectric elements Pand Parranged into alignment along an expanding/shrinking direction. Both ends of the piezoelectric element P, facing in the expanding/shrinking direction, are fixed to a base member and a movable member, respectively. The other piezoelectric element Pis fixed to the base member only at one end. A gap L is formed between the piezoelectric element Pand the movable member. Where expanding displacement amounts of the piezoelectric elements Pand Pare aand a, respectively, voltage applied to the piezoelectric elements Pand Pis so controlled to satisfy an equation, a+a=a≧L. It is possible to position the movable member at a position within a maximum stroke a in the nano-order. The driving units may be arranged in the orthogonal directions, thereby providing the positioning device with two degrees of freedom, and further providing six degrees of freedom including rotation axes.