The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2005
Filed:
Apr. 01, 2002
Applicant:
Carsten Michaelsen, Geesthacht, DE;
Inventor:
Carsten Michaelsen, Geesthacht, DE;
Assignee:
GKSS-Forschungszentrum Geesthacht GmbH, Geesthacht, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K001/06 ;
U.S. Cl.
CPC ...
Abstract
A mirror element for the reflection of x-rays, particularly for EUVL exposure systems for the manufacture of semiconductor structures, wherein the x-rays reach the mirrors under a certain incident angle, consists of a substrate with a multilayer structure disposed thereon which multilayer structure comprises at least a first layer of a lanthanum-containing compound and a second layer of a boron-containing compound alternately disposed on the substrate.