The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 2005
Filed:
Jun. 07, 2002
Applicants:
Guy P. Lavallee, State College, PA (US);
Jeffrey M. Catchmark, Bellefonte, PA (US);
Youngchul Lee, State College, PA (US);
Inventors:
Guy P. Lavallee, State College, PA (US);
Jeffrey M. Catchmark, Bellefonte, PA (US);
Youngchul Lee, State College, PA (US);
Assignee:
The Penn State Research Foundation, University Park, PA (US);
Primary Examiner:
Int. Cl.
CPC ...
G03C005/00 ;
U.S. Cl.
CPC ...
Abstract
A method of patterning a layer of e-beam sensitive dielectric material, such as bisbenzocyclobutene monomers, using electron beam lithography.