The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2005
Filed:
Nov. 22, 2001
Gerhard Wötting, Coburg, DE;
Peter Woditsch, Krefeld, DE;
Christian Hässler, Shanghai, CN;
Gunther Stollwerck, Krefeld, DE;
Gerhard Wötting, Coburg, DE;
Peter Woditsch, Krefeld, DE;
Christian Hässler, Shanghai, CN;
Gunther Stollwerck, Krefeld, DE;
H. C. Starck Ceramics GmbH & Co. KG, Selb, DE;
Abstract
The invention relates to a silicone nitride based substrate for semi-conductor components, said substrate containing silicon nitride (Si3N4), silicon carbide (SIC) and silicon oxynitride(Si2N2O) as crystalline phases. The silicon phase content is less or equal to 5%, the shrinkage during production is less than 5% and the open porosity of the substrate is less than 15% vol. %. The invention also relates to a method for the production and use of said substrate as an element of semi-conductor components, particularly thin film solar cells, and semi-conductor components which contain said substrate.