The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 12, 2005

Filed:

Mar. 01, 2001
Applicants:

Burkhard Danielzik, Bingen, DE;

Markus Kuhr, Woellstein, DE;

Wolfgang Moehl, Worms, DE;

Inventors:

Burkhard Danielzik, Bingen, DE;

Markus Kuhr, Woellstein, DE;

Wolfgang Moehl, Worms, DE;

Assignee:

Schott Glas, Mainz, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05H001/46 ; C23C016/00 ;
U.S. Cl.
CPC ...
Abstract

The method for coating plural surfaces on multiple sides of a substrate, especially a lens, includes launching microwave outputs into a microwave reactor at respective microwave launch sites; selecting respective microwave outputs to be greater than or equal to thresholds at which corresponding plasmas having a reduced permeability to microwave radiation arise in the microwave reactor; setting distances between the plural surfaces and microwave launch sites greater than microwave penetrations depths in the plasmas; placing respective dielectric tuning elements in microwave fields formed from the microwave outputs at the launch sites; and adapting the shapes of the dielectric tuning elements to the plural surfaces to be coated, so that plasma inhomogeneities are corrected and coatings with a uniformity of ±1% are formed on the plural surfaces.


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