The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2005
Filed:
Nov. 06, 2001
Applicants:
Stephan Voser, Buchs, CH;
Eduard Karl Lorenz, Truebbach, CH;
Inventors:
Stephan Voser, Buchs, CH;
Eduard Karl Lorenz, Truebbach, CH;
Assignee:
Unaxis Trading AG, Trubbach, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C014/35 ;
U.S. Cl.
CPC ...
Abstract
Method for sputtering from a dielectric target () in a vacuum chamber () with a high frequency gas discharge, the target () being mounted on a cooled metallic back plate () and this back plate forming an electrode () supplied with high frequency, includes a target thickness (Td) profiled () differently over the surface such that in the regions of a desired decrease of the sputtering rate the target thickness (Td) is selected to be greater than in the remaining regions.