The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 12, 2005
Filed:
Dec. 19, 2000
Yoshikazu Sugiyama, Yokohama, JP;
Yasushi Ohuchi, Kawasaki, JP;
Yoshikazu Sugiyama, Yokohama, JP;
Yasushi Ohuchi, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
The end portion on the side of the second end surface of the first optical fiberis inserted into the inner race in the central part of the roll-bearing type bearing, and is fastened to this inner race. The fastening position of this end surface on the side of the second end surface is adjusted to match a specified position on the axis of rotationin order to emit probe light and allow the incidence of the reflected signal light. The probe light emitted from the second end surface of the second optical fiberpasses through the transparent windowand is caused to illuminate the polished surface of the substrate. The reflected signal light that is reflected from this point again passes through the transparent windowin the opposite direction, and is incident on the second end surface of the second optical fiber. Thus, even in cases where monitoring is performed in an operating state in which the polishing surface plate of the polishing apparatus is rotating, the first optical fibercan be kept in a non-rotating state; as a result, the light source, beam splitter, light detectorand first light-coupling lens, which require installation space, can be installed in non-rotating positions.