The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Sep. 25, 2002
Hirokazu Uchiyama, Higashiosaka, JP;
Hideki Kuwajima, Kyoto, JP;
Hirokazu Uchiyama, Higashiosaka, JP;
Hideki Kuwajima, Kyoto, JP;
Abstract
A thin film piezoelectric element used in an actuator unit for fine positioning, and its manufacturing method, the manufacturing method including laminating two piezoelectric thin films held between electrode layers by using adhesive, and selectively removing only the second substrate in order to process the thin films remaining on the first substrate into a plurality of separated structures. After that, an insulating layer and external connecting electrode are formed to cover the exposed surface of the structure, thereby forming a plurality of thin film piezoelectric elements. Resin is applied to cover the thin film piezoelectric element, and a temporary fixing substrate is bonded thereto, and after selectively removing the first substrate, the temporary fixing substrate is separated, and the resin is removed from the piezoelectric element surface in order to separate the plurality of thin film piezoelectric elements.