The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 05, 2005
Filed:
Jul. 20, 2001
Alain Izadnegahdar, Orange Village, OH (US);
James Siekkinen, Bay Village, OH (US);
Horacio V. Estrada, Beachwood, OH (US);
Brad Boggs, Mentor, OH (US);
Michael Nagy, Lakewood, OH (US);
Kevin Stark, Richmond Heights, OH (US);
Alain Izadnegahdar, Orange Village, OH (US);
James Siekkinen, Bay Village, OH (US);
Horacio V. Estrada, Beachwood, OH (US);
Brad Boggs, Mentor, OH (US);
Michael Nagy, Lakewood, OH (US);
Kevin Stark, Richmond Heights, OH (US);
Rosemount Aerospace Inc., Burnsville, MN (US);
Abstract
A method for forming a sensor including the steps of providing a base wafer and forming a sensor cavity in the base wafer. The method further includes the step of coupling a diaphragm wafer to the base wafer, the diaphragm wafer including a diaphragm portion and a sacrificial portion. The diaphragm wafer is coupled to the base wafer such the diaphragm portion generally covers the sensor cavity. The method further includes the steps of reducing the thickness of the diaphragm wafer by removing the sacrificial portion, and forming or locating at least one piezo resistive portion on the diaphragm portion.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile