The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Dec. 18, 2002
Robert J. Chong, Austin, TX (US);
Michael L. Miller, Chicago, IL (US);
Alexander J. Pasadyn, Austin, TX (US);
Eric O. Green, Austin, TX (US);
Robert J. Chong, Austin, TX (US);
Michael L. Miller, Chicago, IL (US);
Alexander J. Pasadyn, Austin, TX (US);
Eric O. Green, Austin, TX (US);
Advanced Mirco Devices, Inc., Austin, TX (US);
Abstract
A method and apparatus are provided for determining a next tool state based on fault detection information. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, determining at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data and estimating a next state of the processing tool based on at least the determined portion of the noise.