The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Mar. 11, 2003
Hiromu Ishii, Kanagawa, JP;
Yasuyuki Tanabe, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Masami Urano, Kangawa, JP;
Toshishige Shimamura, Kanagawa, JP;
Yuji Uenishi, Saitama, JP;
Takanori Kiyokura, Kanagawa, JP;
Hiromu Ishii, Kanagawa, JP;
Yasuyuki Tanabe, Kanagawa, JP;
Katsuyuki Machida, Kanagawa, JP;
Masami Urano, Kangawa, JP;
Toshishige Shimamura, Kanagawa, JP;
Yuji Uenishi, Saitama, JP;
Takanori Kiyokura, Kanagawa, JP;
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Abstract
An optical switch device includes at least an optical switch element and driving control circuit. In the optical switch element, a fixed electrode portion is arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed. A mirror structure has a plate-shaped movable portion arranged above the fixed electrode portion while opposing the fixed electrode portion. A reflecting portion is formed at least at part of the movable portion to reflect light. A support member is fixed around the fixed electrode portion on the semiconductor substrate via a dielectric layer and supports the mirror structure. The driving control circuit is incorporated in the integrated circuit to drive the optical switch element by applying a predetermined potential to the movable portion and fixed electrode portion.