Sensor package for harsh environments

Abstract

A sensor can be configured to generally include a flow channel block having a flow channel formed therein, and a sensor chip for sensing fluid flow, wherein a fluid in the flow channel surrounds the sensor chip. Alternatively, the sensor chip can be fastened at one side to a substrate and on another side of the substrate to a core tube inserted into the flow channel. This core tube provides electrical insulation and corrosion protection to the sensor chip, reduces flow noise, (and by the non-intrusive nature of the measurement) essentially eliminates the risk of fluid leakage, and maintains the fluid super-clean and contamination-free while improving structural integrity for the thermal measurements derived from the sensor chip. The use of such a core tube configuration also can protect the sensor from corrosion, radioactive or bacterial contamination, overheating, or freeze-ups. Such a core tube configuration also enables the core tube to be detachable and disposable, without requiring the replacement of the more costly sensor chip with its electronics and calibration.