The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 28, 2005

Filed:

May. 30, 2003
Applicants:

Andrew Ziegler, Arlington, MA (US);

David F. Arnone, Mountain View, CA (US);

Evan Drake Harriman Green, San Jose, CA (US);

Inventors:

Andrew Ziegler, Arlington, MA (US);

David F. Arnone, Mountain View, CA (US);

Evan Drake Harriman Green, San Jose, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L041/08 ;
U.S. Cl.
CPC ...
Abstract

A mover assembly () that moves or positions an object () includes a mover output (), an actuator (), and a measurement system (). The mover output () is connected to the object (), and the actuator () causes the mover output () to rotate about a first axis and move along the first axis. In this embodiment, the measurement system () directly measures the movement of the mover output () and provides feedback regarding the position of the mover output ().


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