The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Oct. 24, 2002
Jeong-hee Cho, Gyeonggi-do, KR;
Jeong-Hee Cho, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Gyeonggi-Do, KR;
Abstract
In a method and an apparatus for measuring process errors capable of reducing the process errors, and a method and an apparatus for measuring an overlay, at least two regions are assigned on an object to be measured, which has been passed through a predetermined unit process. Process error values of each region are detected. Error correcting values of each region are calculated based on the process error values. The calculated error correcting values are fed back to a device performing the predetermined unit process. The process error values are merged and outputted as one file. The error correcting values of each region formed on the object are reflected in the device performing the unit process, so the process failure generated in each region of the object can be reduced when the unit process is performed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile