The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2005
Filed:
Dec. 23, 2002
Yeong-jeong Ou, Keelung, TW;
Taikang Shing, Hsinchu, TW;
Justin Clark, Salt Lake City, UT (US);
Ke-shieng Yang, Taipei, TW;
Jeng-shie Chung, Hsinchu, TW;
Yeong-Jeong Ou, Keelung, TW;
TaiKang Shing, Hsinchu, TW;
Justin Clark, Salt Lake City, UT (US);
Ke-Shieng Yang, Taipei, TW;
Jeng-Shie Chung, Hsinchu, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A micro pressure sensor comprising a glass substrate or a bulk silicon wafer with a rampart protruding from the surface and a plurality of first contacting pads, a thin membrane having a plurality of piezo-resistors, circuit patterns, and a plurality of second contact pads, and conducting lines, wherein the plurality of contact pads are partially exposed to outside. The rampart on the substrate has a cavity formed on the center of the top surface of the rampart. The top surface of the rampart is tightly bonded to the surface of the thin membrane. The piezo-resistors are sealed in the cavity. Preferably, the micro sensor further comprises a plurality of thermo sensors, and a plurality of temperature-controlling elements all enclosed inside the cavity, and additional protective layers formed on the exposure regions of all contact pads.