The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2005
Filed:
Feb. 07, 2003
Hee-jueng Lee, Gyeonggi-do, KR;
Myung-ho Ko, Gyeonggi-do, KR;
Hee-Jueng Lee, Gyeonggi-do, KR;
Myung-Ho Ko, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
According to embodiments of the invention, a first gate insulating pattern and a mask pattern are sequentially stacked on a semiconductor substrate. Subsequently an impurity region is formed in the semiconductor substrate. Next, the mask pattern is removed to expose the first gate insulating pattern and a second gate insulating layer is formed on the entire surface thereof. The mask pattern is preferably formed of an anti-reflecting pattern and a photoresist pattern that are sequentially stacked. The anti-reflecting pattern is preferably formed of a material layer without etching selectivity with respect to the photoresist pattern. For this, the anti-reflecting pattern is preferably formed of organic materials including hydrocarbonic compounds. In addition, removing a mask pattern is performed with an etch recipe having an etch selectivity with respect to the first gate insulating pattern.