The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2005
Filed:
Sep. 16, 2003
Applicants:
Kameshwar Poolla, Berkeley, CA (US);
Randall S. Mundt, Pleasanton, CA (US);
Inventors:
Kameshwar Poolla, Berkeley, CA (US);
Randall S. Mundt, Pleasanton, CA (US);
Assignee:
OnWafer Technologies, Inc., Dublin, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F019/00 ;
U.S. Cl.
CPC ...
Abstract
Presented are methods, systems, and apparatus for deriving heat flux information and using heat flux information for a workpiece used in temperature sensitive processes.